Abstract
Tungsten (W), carbon (C), and titanium (Ti) thin films were prepared on carbide steel cylinder rods using a new magnetron sputtering deposition method to prevent their corrosion or increase their friction resistance. In this method, plasma was generated between the cylinder rod anode substrate and the cylinder pipe targets, and it moved toward the axial direction with the generation of a modulated magnetic field by a low-frequency alternating coil current. Experimental results showed that the surface morphology of the film became smooth, and the surface roughness of the film decreased. Deposition rate and film uniformity increased with the use of a modulated magnetic field, and friction coefficient increased as a result of the film preparation used.
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