Abstract
The effects of substrate temperature on the structural and superconducting properties of YBa2Cu3O7−x films prepared by metalorganic chemical vapor deposition have been studied in the temperature range of 550 to 690 °C. Highly c-axis oriented films with transition temperatures of 90 K and critical current densities at 77.5 K and 0 T larger than 106 A/cm2 could be produced at substrate temperatures above 650 °C. As the temperature was decreased, the amount of a-axis orientation in the film increased. Films grown at a substrate temperature of 600 °C showed a strong a-axis orientation with a transition temperature of 83.5 K and a critical current density of 4.5×105 A/cm2 at 77.5 K and 0 T.
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