Abstract
Effects of Substrate Bias Voltage on Structural and Optical Properties of Co-Sputtered (AlxGa1–x)2O3 Films
Published Version
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https://doi.org/10.1007/s11664-023-10673-7
Journal: Journal of Electronic Materials | Publication Date: Aug 27, 2023 |
Effects of Substrate Bias Voltage on Structural and Optical Properties of Co-Sputtered (AlxGa1–x)2O3 Films
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