Abstract
ABSTRACT The effects of rapid thermal annealing (RTA) on microstructures, properties, and residual stress of Pt/Ti electrodes and sol-gel derived lead zirconate titanate (PZT) films were investigated. It was found that when heating rate was 3.5°C/s, the Pt/Ti electrode conglomerated to form a typical hillock surface morphology, companied by remarkable degradations in both surface roughness and electric conductivity. When using 10.5°C/s as the heating rate, the Pt/Ti conglomeration and degradation can be effectively retarded. Accordingly, the PZT film exhibited different properties at various RTA conditions. Furthermore, Ti diffusion was found mainly happened in a short period after heat-treatment started.
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call