Abstract
Piezoelectric energy harvesters have proven to have the potential to be a power source in a wide range of applications. As the harvester dimensions scale down, the resonance frequencies of these devices increase drastically. Proof masses are essential in micro-scale devices in order to decrease the resonance frequency and increase the strain along the beam to increase the output power. In this work, the effects of proof mass geometry on piezoelectric energy harvesters are studied. Different geometrical dimension ratios have significant impact on the resonance frequency, e.g., beam to mass lengths, and beam to mass widths. A piezoelectric energy harvester has been fabricated and tested operating at a frequency of about 4 kHz within the audible range. The responses of various prototypes were studied, and an optimized T-shaped piezoelectric vibration energy harvester design is presented for improved performance.
Highlights
Piezoelectric energy harvesters present a solution to the power requirements of many devices and can provide an alternative power source to batteries in a wide range of applications
This frequency range was selected as a trade-off between silicon area of the harvester designs and their resonant frequency in order to fabricate these devices in a commercial MEMS process
The MEMS energy harvester features a central beam that is connected to a proof mass
Summary
Piezoelectric energy harvesters present a solution to the power requirements of many devices and can provide an alternative power source to batteries in a wide range of applications. The energy harvester designs presented operate over a range of resonant frequencies ranging from 2 to 5 kHz, and the effect of geometry variations on the resonant frequency of these devices is studied. This frequency range was selected as a trade-off between silicon area of the harvester designs and their resonant frequency in order to fabricate these devices in a commercial MEMS process
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