Abstract
ZrC/ZrB2 multilayered coatings with bilayer periods of 3.5–40 nmare synthesized by rf magnetron sputtering. Analyses of x-raydiffraction, scanning electron microscopy and nanoindentation indicatethat multilayered coatings possess much higher hardness and greaterfracture resistance than monolithic ZrC and ZrB2 coatings. Amaximum hardness (41.7 GPa) and a critical fracture load (73.7 mN)are observed in the multilayer with Λ = 32 nm deposited at thesubstrate bias -40 V. Higher residual stress built in the ZrC layer canbe released by periodic insertion of ZrB2 into the ZrC layer. Aclear multilayered structure with mixed ZrB2(001), ZrB2 (002)and ZrC (111) orientations should be responsible for the enhancedmechanical properties.
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