Abstract
The purpose of this paper is to investigate the effects of probe tilt on the results of nanoscratch by finite element analysis (FEA). In nanoscratch experiments, it is hard to assure absolute verticality between the scratch probe and the specimen. Simulation results show that different tilt cases of the probe have different extents of influences on the residual scratch profile, the projected contact area and the frictional coefficient of nanoscratch results. To get reliable results from the nanoscratch experiments, the verticality between the scratch probe and the specimen should be accurately guaranteed. On the other hand, the tilt phenomenon of the probe can also be used to obtain some wanted profiles.
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