Abstract

PZT thick films up to 20μm have been prepared from a 0–3 composite method. The effects of powder characteristics on the microstructure and electric properties of the film have been examined and evaluated. The powder characteristics is found to be of importance in determining dielectric and ferroelectric parameters. PZT thick films made from amorphous PZT fine powders have good electric properties. For PZT(40/60) and PZT(53/47) films, the Pr, Ec, and /varepsilonr are 23.5 and 19.5/varepsilonC/cm2, 48 and 29kV/cm, 680 and 950, respectively.

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