Abstract
The structural, electronic, and optical properties of β-Ga2O3 with oxygen vacancies are studied by employing first-principles calculations based on density function theory. Based on the defects formation energies, we conclude the oxygen vacancies are most stable in their fully charge states. The electronic structures and optical properties of β-Ga2O3 are calculated by Generalized Gradient Approximation + U formalisms with the Hubbard U parameters set 7.0 eV and 8.5 eV for Ga and O ions, respectively. The calculated bandgap is 4.92 eV, which is consistent with the experimental value. The static real dielectric constants of the defective structures are increased compared with the intrinsic one, which is attributed to the level caused by the Ga-4s states in the bandgap. Extra peaks are introduced in the absorption spectra, which are related to Ga-4s and O-2p states. Experimentally, β-Ga2O3 films are deposited under different O2 volume percentage with ratio-frequency magnetron sputtering method. The measured results indicate that oxygen vacancies can induce extra emission peaks in the photoluminescence spectrum, the location of these peaks are close to the calculated results. Extra O2 can increase the formation energies of oxygen vacancies and thus reduce oxygen vacancies in β-Ga2O3.
Highlights
The structural, electronic, and optical properties of β-Ga2O3 with oxygen vacancies are studied by employing first-principles calculations based on density function theory
Taking advantage of the oxygen vacancies, amorphous Ga2O3 has been used as a resistance random access memory (RRAM)[15,16,17]
The formation energy of the oxygen vacancies of β-Ga2O3 has been investigated in the past years, and the results can vary with different functionals and approximation methods[12,13,14]
Summary
Both oxygen-rich and oxygen-poor cases are calculated. From the electronic structures and DOS results, we concluded that these peaks are caused by the transition from Ga-4s states in the defective level induced by oxygen vacancies to the Ga-4s states in the conduction band. These peaks are corresponding to where the reflectivity decrease rapidly.
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