Effects of nitrogen on the structure and properties of highly tetrahedral amorphous carbon films

Abstract

Nitrogen-containing tetrahedral amorphous carbon films (ta-C) have been prepared using a magnetic field filtered plasma stream deposition method. The plasma stream was first formed by sputtering of a graphite target in nitrogen-argon atmospheres. The partial pressure of nitrogen, , was in the range 0-7 Pa at total pressure of deposition Pa. The optical and electrical properties of samples were studied using x-ray photoelectron spectroscopy (XPS), Fourier transform infrared absorption spectroscopy (FTIR), UV-visible optical absorption spectroscopy and measurements of electrical conductivity in the temperature range 300-500 K. The incorporation of small amounts of nitrogen will result in an increase in electrical conductivity, a slight drop of the band gap and an increase in band-tail absorption. These suggest that incorporation of a small amount of nitrogen into ta-C films will induce graphitization of bonding. For samples deposited at Pa, nitrogenation of films is very pronounced. The actual nitrogen content in films in terms of atomic percentage can be as much as 47%. The films have a wide band gap of 4.05 eV and an extremely low electrical conductivity. These suggest that a carbon nitride film is formed. The configurations of N atoms in the ta-C network are identified and discussed.