Abstract
The effects of nano-diamond seeds on the performance of diamond-like carbon (DLC) films were investigated. In this study, the high uniform DLC films were deposited on substrates seeded with nano-diamond by using a magnetron sputtering system. Then, the effects of nano-diamond seeds on DLC films were determined. Raman spectroscopy revealed a decrease of sp3 fraction due to the introduction of nano-diamond seeds. Atomic force microscope (AFM) observed all samples have an average root mean square (RMS) roughness of 1.8 nm. Scanning electron microscopy (SEM) displayed that a large number of small size conical hillock geometrical anomalies can be caused by nano-diamond seeds. Indentation tests revealed that nano-diamond seeds can enhance the hardness of DLC films, whose hardness range is from 28.3 GPa to 32.1 GPa in this work.
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