Abstract
The non-equilibrium electron energy distribution function (EEDF) obtained via solving the Boltzmann equation is introduced into the ∞uid model,and the efiects of the microwave frequency on the EEDF and air breakdown are investigated. Numerical simulations show that the breakdown threshold of the ∞uid model with the non- equilibrium EEDF agrees well with that of the reported experiments. The microwave frequency plays an important role on the shape of the non-equilibrium EEDF at low pressures. The breakdown time at the low pressures predicted by the Maxwellian EEDF is shorter than that from the non-equilibrium EEDF in low-frequency oscillating flelds, while matches the latter in high-frequency oscillating flelds.
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