Abstract
The full aperture complex amplitude transmittance function of a multi-level diffraction lens with mask-alignment errors was derived based on scalar diffraction theory. The point spread function (PSF) was calculated by the Kirchhoff diffraction integral. It is found that the radius of the Airy disk increases with the increase of the error in the direction of misalignment, and the image center shifts along the direction of misalignment. A four-level diffractive lens with a diameter of 80 mm was fabricated, and its PSF and diffraction efficiency of +1st order were calculated and measured. The distribution of PSF is consistent with the calculated results, and the tested diffraction efficiency is slightly smaller than the calculated value; the relative error is 5.71%.
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