Abstract

The fast tool servo (FTS) system is widely used for micro-structure manufacturing by diamond turning. Conventional FTS had been generally researched regarding the front/back-axial swing direction. However, development of more complex machining technology is demanded for the FTS. In this paper, we developed a right/left-horizontal swing FTS (HFTS) and analyzed its characteristics with various hinge structures. Flexure hinge structures were designed four types, considering the influence of mass and the number of hinges. Also, to compare the difference in machining performance with hinge structure, we compared the results of a machined microwave pattern on a Ni-coated steel roll mold. Comparing the machining results, the influence of mass was minor; however, machining performance varied with the number of fixed hinges. Having two fixed hinges was not suitable for precision machining due to strong over-constraint conditions. Thus, a single-hinge HFTS provides the appropriate hinge structure for precision machining of a roll mold.

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