Abstract
Abstract The NbN and Nb films are prepared by the technique of radio frequency (RF) magnetron sputtering and heat-treated at 300 °C and 400 °C respectively in the present work. The influences of heat-treatment on the morphology, chemical composition, structure, nanomechanical properties and corrosion resistance of the films are studied. Results show that the particles in the films prepared by the above method are all in nano-size. The polygon shaped particles in the Nb films are very thin and small, while the particles in the NbN films prepared under the same condition are pebble-like, larger, and more compact. The nanomechanical properties and corrosion resistance of both the films are improved apparently after the heat-treatment. The corrosion resistance and mechanical properties of NbN film are always better than those of Nb film. The mechanism about the heat-treatment on the property considering the structural evolution is also discussed in this paper.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
