Effects of fin geometry on boiling heat transfer from silicon chips with micro-pin-fins immersed in FC-72

Abstract

Experiments were performed to study the effects of the height and thickness of square micro-pin-fin on boiling heat transfer from silicon chips immersed in a pool of degassed or gas-dissolved FC-72. Six kinds of micro-pin-fins with the dimensions of 30 × 60, 30 × 120, 30 × 200, 50 × 60, 50 × 200 and 50 × 270 μm 2 (thickness, t × height, h) were fabricated on the surface of a square silicon chip with the dimensions of 10 × 10 × 0.5 mm 3 by using the dry etching technique. The fin pitch was twice the fin thickness. The experiments were conducted at the liquid subcooling, Δ T sub, of 0, 3, 25 and 45 K under the atmospheric condition. The results were compared with previous results for a smooth chip and three chips with enhanced heat transfer surfaces. The micro-pin-finned chips showed a considerable heat transfer enhancement in the nucleate boiling region and increase in the critical heat flux, q CHF, as compared to the smooth chip. The wall temperature at the CHF point was always less than the maximum allowable temperature for LSI chips (=85 °C). For a fixed value of t, q CHF increased monotonically with increasing h. The increase was more significant for larger t. The q CHF increased almost linearly with increasing Δ T sub. The maximum value of allowable heat flux (=84.5 W/cm 2), 4.2 times as large as that for the smooth chip, was obtained by the chip with h=270 μm and t=50 μm at Δ T sub=45 K.