Effects of Dy on structural, morphology, optical, and resistive switching properties of HfO2 thin films

Abstract

This paper studies the effect of Dy on the structure, morphology, and optical properties of HfO2 thin films deposited on fused silica substrates and the optical transparency and resistive switching (RS) behavior of the thin films as an active insulator layer in Ag/active insulator layer/ITO/glass memories. Thin films were deposited by spin-coating using a precursor solution obtained by the Pechini-type sol-gel method. The structural analysis revealed that the insertion of Dy ions into the HfO2 lattice caused the phase transformation from the monoclinic to the cubic phase. Morphological analysis revealed that the thin films had thicknesses between 98 and 101 nm, and their surfaces were composed of 3D islands formed by aggregates of spherical particles ranging from 8 to 5 nm. The active insulator layers had thicknesses ranging from 235 to 218 nm, with no cavities or cracks between them. The optical transparency of the active insulator layer/ITO/glass memory structures was between 70 and 87 %. Optical transmittance, optical bandgap, and optical constants were modified incorporating Dy ions into HfO2 thin films compared to the undoped HfO2 thin films. Incorporating Dy ions into HfO2 increased oxygen vacancies in the active insulator layers. The memory with 10 w% of Dy had the highest resistance off/on ratio of 9.04 compared with undoped HfO2 memory. Also, the conduction mechanism in the high resistive state (HRS) of the memory with 10 w% of Dy was related to ohmic conduction and space charge limited conduction (SCLC).