Abstract
Pentacene organic thin-film transistors (OTFTs) with HfLaO high-κ gate dielectric were fabricated. The dielectric was prepared by a sputtering method and then annealed in N2, NH3, O2, or NO at 400 °C. The carrier mobility of the NH3-annealed OTFT could reach 0.59 cm2/V · s, which is higher than those of the other three devices. Moreover, the NH3-annealed OTFT obtained the smallest subthreshold swing of 0.26 V/dec among them. Furthermore, 1/f noise measurement indicated that the NH3-annealed OTFT achieved the smallest 1/f noise. All these should be attributed to the improved interface between the gate dielectric and the organic semiconductor associated with the passivation effects of the NH3 annealing on the dielectric surface.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have