Abstract
The flow angle is an important characteristic of borophosphosilicate (BPSG) films. In this work the effects of chemical compositions and various film post-growth treatments, namely delay time, deionized water rinse and flow ambients, on the flow angle are explored with the help of Fourier transform IR spectroscopy and electron spectroscopy for chemical analysis. The spectral analysis shows that the effects of the various treatments on the flow angle possibly result from the chemical changes that occur on film surfaces. It is found that the BPSG films absorb moisture during delay and deionized water rinse. The absorbed moisture enhances the silicate bonding characteristics and causes the boron oxide to be transformed into boron hydroxide. These phenomena give rise to a larger flow angle. Details of all the effects will be discussed and appropriate film post-growth treatments for obtaining BPSG films with good flow properties will be presented.
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