Abstract
The lead magnesium niobate–lead titanate (PMN–PT) thin films with and without the TiO 2 seed layer were prepared by a pulsed laser deposition (PLD) deposited on Pt/Ti/SiO 2/Si substrates. The films were treated by two-step annealing and normal annealing with rapid thermal annealing (RTA). The effects of two-step annealing and the TiO 2 seed layer on the phase composition of PMN–PT films were studied. The results show that the PMN–PT film with TiO 2 seed layer can gain a pure perovskite phase with a high (1 0 0) preferential orientation after the two-step annealing technique.
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