Abstract
Lead–magnesium niobate–lead titanate (PMN–PT) thin films with and without the TiO 2 seed layer were deposited on Pt/Ti/SiO 2/Si substrates through pulsed laser deposition. The study aimed to characterize the effect of the TiO 2 seed layer on the phase composition and properties of PMN–PT film. Without the TiO 2 seed layer, the pure perovskite phase could be obtained in the thinner PMN–PT film while with the TiO 2 seed layer, the pure perovskite phase was formed in the thicker PMN–PT film. The ferroelectric properties of PMN–PT films with the TiO 2 seed layer were exhibited. As a result, the maximum amount of remnant polarization reached the amount of 32 μC/cm 2 for the PMN–PT thin film with the TiO 2 seed layer.
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