Abstract

We have already reported that Fe-Ni films prepared in citric-acid-based plating baths show good soft magnetic properties. In this paper, we investigated the effect of the grain size of the Fe-Ni crystalline phase in the films on magnetic properties, and employed an annealing and a pulse plating method in order to vary the grain size. The coercivity of the annealed Fe-Ni films at 600 °C shows large value, and good correlation between the grain growth and the coercivity was observed. The pulse plating enables us to reduce the grain size of the as-plated Fe-Ni films compared with the DC plating method, and we realized smooth surface and low coercivity of the Fe-Ni films using the pulse plating method. From these results, we confirmed the importance of the reduction in the grain size, and concluded that a pulse plating is an effective method to improve the good soft magnetic properties for our previously-reported Fe-Ni films.

Highlights

  • Fe-Ni films are widely used in electric devices, and various fabrication processes are commercially applied, such as sputtering, vapor deposition and electroplating

  • We investigated the effect of the grain size of the Fe-Ni crystalline phase in the films on magnetic properties, and employed an annealing and a pulse plating method in order to vary the grain size

  • The pulse plating enables us to reduce the grain size of the as-plated Fe-Ni films compared with the DC plating method, and we realized smooth surface and low coercivity of the Fe-Ni films using the pulse plating method

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Summary

INTRODUCTION

Fe-Ni films are widely used in electric devices, and various fabrication processes are commercially applied, such as sputtering, vapor deposition and electroplating. We confirmed that Fe-rich films show low coercivity in spite of their large magnetocrystalline anisotropy and magnetostriction constants, and that the low coercivity values are attributed to the grain refinement effect based on the XRD analysis. This result suggests that reduction in grain size is important for as-plated Fe-Ni films as typical for soft magnetic nanocrystalline materials.[7,8,9,10,11,12,13] we focused on grain size of Fe-Ni films. We employed a pulse plating method, which is well-known as a technique to reduce grain sizes of deposits, in order to improve soft magnetic properties of our previously reported Fe-Ni films

Electroplating
Annealing
Measurements
RESULTS AND DISCUSSION
CONCLUSIONS
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