Abstract
Fe and Ni-Fe films are formed by the ion beam sputtering method. Changes in magnetic properties due to the dispersion angle of sputtered atoms are examined. The lowest coercive force and the highest relative permeability are obtained at a dispersion angle of 60-90° . The Fe and Ni-Fe films show preferred orientations of <110> and <111> normal to the film plane, respectively. Good soft magnetic properties are found to be obtained at angles in which the films have strong preferred orientations.
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