Abstract
A real-time in-situ time-resolved optical inspection system comprising two He–Ne probe lasers, a digital oscilloscope, and three fast photodetectors is developed. The effects of angle of probe laser and pinhole diameter on the time-resolved optical inspection system are investigated during excimer laser crystallization. The longest melt duration and ablation excimer laser fluence are independent of pinhole size. The pinhole with a diameter of 0.3 mm is recommended to use in the time-resolved optical inspection system. Determination of melt duration and observation of explosive crystallization oscillation are independent of angle of probe laser, but four criteria for the relationship between probe lasers and photodetectors should be followed.
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