Abstract
A magnetoplumbite type of hexagonal ferrite films with composition of BaAl 2Fe 10O 19 were deposited using Facing Targets Sputtering (FTS) apparatus on SiO x /Si wafers with Pt seed layers to promote the c-axis orientation perpendicular to the film plane. Then, the films were post-annealed at 900°C in air. With the increase of Al content, saturation magnetization decreased, but coercivity and perpendicular squareness increased. The BaAl 2Fe 10O 19 films with coercivity of 3.4 kOe and perpendicular squareness as high as 0.88 were prepared.
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