Abstract
A magnetoplumbite type of hexagonal Ba-ferrite films, whose c-axis of crystallites is well oriented perpendicularly to the film plane, have been prepared by means of a conventional rf diode sputtering system. Morphological and crystallographic characteristics of sputtered Ba-ferrite films depend strongly on preparation conditions such as the distance between target and substrate d T-S and partial pressure of oxygen gas P O2 during the deposition. Ba-ferrite films with smooth surface are prepared at the extended d T-S in the region of low P O2 . Read/write characteristics of Ba-ferrite thin film deposited on thermally oxidized silicon wafer with radius of two inches were evaluated with ring type head. Recording density D 50 of Ba-ferrite thin film rigid disk depends strongly on Δθ 50 . In this work, D 50 of 110 and 190 kfrpi for Δθ 50 of 4.8 and 2.8°, respectively, have been attained.
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