Abstract

Abstract We fabricated InAsP quantum dots on GaInP lattice-matched to GaAs (0 0 1) using three types of growth sequences by the droplet hetero-epitaxy. By changing group-V ambient before In droplets formation, we investigated the effects of absorbed group-V atoms on the lateral size, height, density, and luminescence intensity of InAsP quantum dots. By supplying tertiarybutylphosphine and tertiarybutylarsine mixed gases before In droplets formation, the lateral size and height of dots decreased, and the luminescence intensity increased by 550 times. It was revealed that the group-V ambient before In droplets formation was very important for the lateral size, height, and the luminescence intensity.

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