Abstract
A first-order () Lamb wave resonator (LWR) with a trapezoid grooves configuration on the top surface of the aluminum nitride membrane between interdigital electrodes is proposed in this paper. Both the simulation and experiment results demonstrate that the can be enhanced with the depth of the trapezoid grooves increasing. Meanwhile, the spurious modes can be suppressed by the trapezoid grooves. A 75% improvement on the has been achieved in a 2.45 GHz mode LWR with trapezoid grooves with spurious modes free. The reaches up to 5.47% without quality factor degradation.
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