Abstract
This paper presents an apodization technique to suppress spurious modes in aluminum nitride (AlN) lamb wave resonators. The apodization pattern proposed is a 5-vertex irregular polygon shape. Three dimensional (3D) simulations based on finite element methods (FEM) show that the presented apodization shape can effectively suppress both transverse and longitudinal spurious modes. To validate the concept, a lamb wave resonator operating at 2.1 GHz with the apodization applied is fabricated in house. The measured impedance response of the resonator with apodization demonstrates complete removal of the spurious modes with frequencies higher than the series resonant frequency (fs), and negligible spurs at the lower side of fs, though the effective coupling coefficient $(\mathbf{k}^{2}_{eff})$ is slightly degraded.
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