Abstract
In this study, alumino-borate glass was manufactured to fabricate glass with excellent corrosion resistance to plasma, and the Y2O3 was substituted with YF3. The basic properties of the glass were analyzed DTA, density, hardness, and transmittance. Plasma corrosion resistance is evaluated by the etch rate, surface roughness, and XPS of the glasses via CF4 plasma etching. The results revealed that all glasses had superior plasma resistance than the reference material, quartz. As the amount of Y2O3 increased, the etch rate decreased, and the YF3-containing glasses exhibited the highest plasma resistance by an etch rate of 22.17 nm/min.
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