Abstract

The Double gate (DG) silicon on insulator (SOI) metal oxide field effect transistor (MOSFET) is the leading contender for sub 100nm devices. This paper presents a systematic study of effect of work function of metal gates on symmetric double-gate (DG) MOSFET. Two-dimensional simulation tools are used to investigate the effect of work function of gates on Double gate MOSFET. From simulation we observed that by changing the work function of the metal gates of Double gate MOSFET we can change the threshold voltage. Hence by using this technique we can set the appropriate threshold voltage of DG MOSFET at same voltage and we can decrease the leakage current and short channel effects.

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