Abstract
The finite volume method was applied to the determination of the three-dimensional convection current during inert gas condensation (IGC) processing by using the commercially available software, "Fluent". The lower velocity of the convection current at higher evaporation temperature resulted from the lower value of the coefficient of thermal expansion. The velocity of the convection current increased with increasing chamber pressure, because the driving force of the buoyancy was directly proportional to the gas density. 13% and 17.3% of the particles were trapped during the first period of circulation in the case of the single and double heaters, respectively.
Published Version
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