Abstract
The hemispherical resonator gyroscope (HRG) is a typical capacitive Coriolis vibratory gyroscope whose performance is inevitably influenced by the uneven electrostatic forces caused by the uneven excitation capacitance gap between the resonator and outer base. First, the mechanism of uneven electrostatic forces due to the significantly uneven capacitance gap in that the non-uniformity of the electrostatic forces can cause irregular deformation of the resonator and further affect the performance and precision of the HRG, was analyzed. According to the analyzed influence mechanism, the dynamic output error model of the HRG was established. In this work, the effect of the first four harmonics of the uneven capacitance gap on the HRG was investigated. It turns out that the zero bias and output error, caused by the first harmonic that dominates mainly the amplitude of the uneven capacitance gap, increase approximately linearly with the increase of the amplitude, and periodically vary with the increase of the phase. The effect of the other three harmonics follows the same law, but their amplitudes are one order of magnitude smaller than that of the first one, thus their effects on the HRG can be neglected. The effect of uneven electrostatic forces caused by the first harmonic on the scale factor is that its nonlinearity increases approximately linearly with the increase of the harmonic amplitude, which was analyzed in depth. Considering comprehensively the zero bias, the modification rate of output error, and scale factor nonlinearity, the tolerance towards the uneven excitation capacitance gap was obtained.
Highlights
Vibratory gyroscopes have drawn tremendous attention for their benefits of high precision, and high reliability, long life, and stable physical and chemistry properties, etc
The first four harmonics of the uneven excitation capacitance gap were harmonics of the uneven capacitance gaps, φ1, φ2, φ3, and φ4 are respectively the initial phases of the investigated in depth to obtain the effect of the uneven electrostatic forces
This paper investigated the effect of uneven electrostatic forces caused by the uneven capacitance gap on the dynamic properties of the resonator in the hemispherical resonator gyroscope (HRG)
Summary
Vibratory gyroscopes have drawn tremendous attention for their benefits of high precision, and high reliability, long life, and stable physical and chemistry properties, etc. Sensors 2019, 19, 1291 which are controlled through electrostatic forces thanks to electrodes located in the immediate proximity of the resonator [2,3]. The electrostatic detecting and exciting technique of the are controlled through electrostatic forcesusing thanksanto electrode electrodes located in the immediate proximity of hemispherical resonator is achieved to establish the electrostatic field. Electrostatic forces are produced by the piezoelectric effect that is applied in the field of current is achieved using electrode to establish theitselectrostatic field. The piezoelectric effect that is applied in the field of current measurement and voltage control thanks the equivalent gap is changed so that the micro-current is detected and amplified to obtain the to its highsignal sensitivity. The small error of capacitance gap will electrostatic forces. The aim of this paper was to develop and apply an analytical model to quantify and the effect effect of of the the uneven uneven electrostatic electrostatic forces, forces, caused caused by by an an uneven uneven capacitance capacitance gap, gap, on on the the dynamic dynamic the response in the response in the HRG
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