Abstract
Thin films of Zn0.95Mn0.05O were synthesized by RF- sputtering in nitrogen gas environment. Structural, optical and mechanical properties of the films with thickness ranging from 398 to 1650nm are studied. The X-ray diffraction (XRD) results show that the as- deposited films are oriented along the (002) direction with hexagonal wurtzite structure. The field emission scanning electron microscopy (FESEM) studies show an increase in grain size with increase in thickness. Optical transmission studies show band gap values in the range 3.03–3.37eV. The values of hardness and Young’s modulus are found to be in the range 14–18GPa and 122–167GPa at an indentation depth of 100nm respectively. The role of nitrogen doping on the microstructure and properties of films is discussed.
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