Abstract
In this paper the potential of zinc oxide (ZnO) thin films as a piezoelectric material for surface acoustic wave (SAW) sensor developments is discussed. ZnO thin films were deposited by RF magnetron sputtering onto Al/SiO/sub 2//Si substrate. In highly oriented, transparent films lattice stress could be reduced sufficiently by varying the sputtering pressure and substrate temperature and by the careful selection of the other sputtering parameters. Availability of these structures for SAW device applications has been demonstrated by producing an electrode structure of a one-port resonator. The design and performance of resonators, based on ZnO films is described.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
