Abstract
TiSiCN coatings were prepared with the multi-arc ion plating and magnetron sputtering technique. The effect of the N2/Ar flow ratio on the properties of TiSiCN coatings was studied using scanning electron microscopy (SEM), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and a friction and wear tester (UMT-3). With an increase in the N2/Ar flow ratio, the number of large particles on the surface first increases and then decreases. The intensity of the TiN (200) diffraction peak increases gradually, while the grain size first decreases and then increases. A TiSiCN coating consists of Ti (N, C) nanocrystallites, amorphous SiC, Si3N4 and carbon. When the N2/Ar flow ratio is 5 : 1, the coating exhibits the highest hardness and excellent wear resistance.
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