Effect of the inertial term of the ion momentum equation on fluid transport simulation for capacitively coupled plasma sources

Abstract

Fluid-based simulations are widely used to analyze or optimize capacitively coupled plasma sources. Although the inertial term of the ion momentum equation affects the accuracy of the solutions, the equation has not been considered in the drift-diffusion approximation model in the numerical solution. Therefore, we, herein, improved the accuracy of the model by applying an effective electric field, considering the inertial term. First, the effective electric field, including the ion inertial term of the ion momentum equation, was derived. Subsequently, one-dimensional fluid simulations were conducted. The numerical results were compared with those of one-dimensional particle-in-cell (PIC) simulations. The results of the developed model were similar to those obtained in the case of solving the full-ion momentum equation, as well as more similar to the PIC simulation results than those obtained in the case of the drift-diffusion approximation.