Effect of the inclination of a test object on the calibration of an SEM

Abstract

The effect of the inclination of a test object on the calibration of a scanning electron microscope (SEM) is considered. It is shown that when the step of a structure or the size of the upper and lower bases of the ledges and grooves is used as a certified parameter, the inclination of the test object does not affect the calibration of the SEM. When using the value of the projection of the inclined sidewall of ledges and grooves on the structure base, the incline of the test object leads to a systematic error in determining the increase (pixel size) several times greater than the random error. A method for determining the inclination angle of the test object is developed that enables the measurement of this angle and the identification and elimination of a systematic error.