Abstract
Growth of the AlxGa1−xN ternary alloy using AlCl3 and GaCl gases on sapphire substrate by hydride vapor phase epitaxy (HVPE) is presented in this study. AlxGa1−xN epilayers were grown directly on sapphire substrate. To investigate the effect of growth temperature, we varied temperature from 1050 to 1090°C at intervals of 20°C. Some compositional non-uniformity was observed on the epilayer grown at 1050°C from the results of UV–vis spectrophotometry, X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). Such a compositional non-uniformity disappeared with the increase of growth temperature and it was confirmed with the existence of Ga-rich islands shown by electron probe microanalysis (EPMA) compositional mapping. In addition, other characteristics such as surface roughness and crystallinity also improved with the increase of growth temperature and showed best results at 1090°C. The Al composition of epilayer grown at 1090°C was around 30%.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.