Effect of the Growth Parameters on Nonlinear Optical Properties of Al‐Doped ZnO Nano Films

Abstract

The objective of this research work is to provide a systematic method to perform test and evaluation on the nonlinear optical properties of Al‐doped ZnO nano thin film structure for designing a high‐performance optical‐electronic structure. Some different kinds of samples can be manufactured for testing. The samples are designed by changing technical parameters such as sputtering power of Al and ZnO, pressure and sputtering time and each parameter has three levels. The test results show that the main factor is the sputtering power of Al, which means the doping density of Al. In the meantime, the Maxwell–Garnett theory is used to investigate the optical prosperities of Al‐doped ZnO nano thin films in the visible range. The optical band gap of Al‐doped ZnO nano thin films increases with the increasing of Al doping density, but it becomes slowly when the doping density is more than 16.0%. The results and the investigation method are useful for designing and manufacturing for nano thin films.