Effect of the diamond saw wires capillary adhesion on the thickness variation of ultra-thin photovoltaic silicon wafers during slicing

Abstract

In order to improve the performance of solar cells and reduce their manufacturing costs, monocrystalline silicon wafers used for manufacturing solar cells are developing towards larger sizes and ultra-thin thickness, and the diameter of diamond saw wires used to cut silicon wafers is also continuously decreasing. These aspects cause uneven thickness and lager thickness variation (TV) of the as-cut wafer during slicing process. The reason of uneven thickness was analyzed from the point of liquid bridge with capillary force between the saw wires in this paper. The mechanical equilibrium equation between the liquid bridge and the saw wires was established based on the Young-Laplace equation, and the theoretical model of the as-cut wafer thickness was derived during the sawing process. The effect of the saw wire tensioning force, span, the diameter of the core wire and the wetting angle of coolant on the as-cut wafer thickness variation was analyzed based on the model. The results show that the increase in the saw wire tensioning force, the core wire diameter and the wetting angle of coolant improved the thickness accuracy and reduced the thickness variation of the as-cut wafer. And the increase in the saw wire span reduced the thickness accuracy and increased the thickness variation. The research results of this paper provide the mechanism analysis for the thickness variation of the ultra-thin wafer during the slicing process. It is of great significance to produce the ultra-thin photovoltaic silicon wafers with the fine saw wire in the future.