Effect of substrates and bottom electrodes on the formation of KTN thin film

Abstract

Abstract This paper reports the preparation of KTN thin films on monocrystalline Sr-TiO3(111), SrTiO3(100), MgO(100) and Si(100) substrates, SiO2 glass substrate, Polycrystalline transparent conducting SnO2(Sb) bottom electrodes (on SiO2 glass) by the Sol-Gel method. The effects of the chemical stability, structure and thermal properties of substrate and bottom electrode materials on the formation of KTN thin films are discussed and it is explained why the pyrochlore phases films on MgO(100), Si(100), SiO2 substrates and SnO2(Sb) bottom electrodes could not be transformed to on the perovskite structure KTN films. Highly oriented KTN thin films of perovskite structure were successfully prepared on SrTiO3(111) and SrTiO3(100) substrates by the Sol-Gel method.