Abstract
The chemical spray (CSP) deposition method has been used to deposit orthorhombic V2O5 thin films onto glass substrate at different substrate temperatures. Raman spectra indicate that films are in orthorhombic V2O5 phase. The FE-SEM micrographs show the formation of nanorods-like morphology. The EDAX study shows that the films are in sub-stoichiometric proportion of V2O5. The presence of V5+ oxidation state of vanadium in V2O5 film is confirmed using XPS study. Selectivity study shows that V2O5 film is a highly promising candidate for selective detection of NO2 gas at moderate working temperature of 200 °C. For V2O5 film deposited at 400 °C, the 20.3% NO2 response for 100 ppm concentration is obtained with response and recovery times of 17 s and 185 s, respectively. The lower NO2 gas detection limit is found to be 20 ppm which is equal to immediately dangerous to life or health (IDLH) value. Finally, role of oxygen ion vacancies in NO2 gas sensing mechanism based on formation of reduced V2O5-X species is discussed.
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