Abstract
Diamond-like carbon (DLC) thin films were deposited on silicon and ITO substrates with applying different negative bias voltage by microwave surface wave plasma chemical vapor deposition (MW SWP-CVD) system. The influence of negative bias voltage on optical and structural properties of the DLC film were investigated using X-ray photoelectron spectroscopy, UV/VIS/NIR spectroscopy, Fourier transform infrared spectroscopy and Raman spectroscopy. Optical band gap of the films decreased from 2.4 to 1.7 with increasing negative bias voltage (0 to − 200 V). The absorption peaks of sp 3 C H and sp 2 C H bonding structure were observed in FT-IR spectra, showing that the sp 2/sp 3 ration increases with increasing negative bias voltage. The analysis of Raman spectra corresponds that the films were DLC in nature.
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