Abstract
Biaxial tensile strengths of radio frequency and ion-beam sputtered silicate glass disks were ≳100% over as-received polished disks. Fracture surface analysis, correlated with the fracture stress, showed failure to originate within the depressions formed from sputtering. Thus sputtering itself limits the increased strength of silicate glasses initially obtained by sputtering away the surface layer containing mechanically introduced flaws.
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