Abstract
Abstract A thin film microheater is developed for microthruster ignition, micro detonator, etc. The microheater was fabricated onto a Prex bulk substrate using a micro-fabrication technology. Sputtering precession was studied for the effect on the properties of Nichrome film. The results show that the smaller the thickness of the film, the smaller the grain size of the film, the more uniform the grain distribution, and the better the compactness of the film When the sputtering power is the same. When the thickness of the film is the same, the smaller the sputtering power, the smaller the grain size of the deposited film, the more uniform the grain distribution, and the better the compactness of the film.
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