Abstract
Crystallographic orientations of Co–Cr films on Co–Mo–Zr amorphous underlayers, the morphology and the surface state of the Co–Mo–Zr film were investigated. The morphology of Co–Mo–Zr film depends on the substrate temperature and sputtering modes for deposition. When the effective substrate temperature is higher than a critical temperature (225 °C), the surface is smooth and columnar structure disappears, and the c-axis dispersion (Δθ50) of Co–Cr film on this underlayer becomes small. Flat surface of Co–Mo–Zr film is one of the essential conditions for small c-axis dispersion of Co–Cr film. Effects of surface contamination are also examined. Carbon is effective to lower the surface energy and to improve the c-axis orientation of Co–Cr film.
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Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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