Effect of SiN Treatment on Optical Properties of In x Ga1−x N/GaN MQW Blue LEDs

Abstract

In this paper, Si-doped GaN template layer and nitride-based multiple quantum well (MQW) light-emitting diodes (LEDs) with conventional GaN buffer layer and GaN buffer layer using SiN treatment were elaborated by metalorganic vapor phase epitaxy (MOVPE). On both kinds of structures, five InxGa1−xN/GaN quantum wells were deposited simultaneously in identical growth conditions. GaN template layer defects that influence on the growth of InxGa1−xN/GaN MQW LEDs were systematically studied by means of scanning electron microscopy, high-resolution x-ray diffraction, temperature-dependant photoluminescence measurement, and electroluminescence. It is shown that optical properties of InxGa1−xN/GaN MQWs depend on the defect density of elaborated templates. Thereafter, we report an enhancement of the emission of blue MQW LEDs using SiN treatment, compared to the MQW LED emissions deposited on a conventional GaN buffer layer.