Abstract
Annealing treatment has an important effect on the electrical properties of Schottky diodes. In this paper, the effect of Schottky annealing temperature on reverse leakage current of 6500 V 4H-SiC JBS diodes was studied. The reverse leakage current of the diode annealed at 500 °C is higher than that of the diode annealed at 450 °C. This is because the Schottky barrier height of the diode annealed at 500 °C is decreased by 0.08 eV, which leads to a large reverse leakage current. Meanwhile, the Schottky barrier height of the diode annealed at 500 °C is decreased more significantly with the increase of measurement temperature, therefore the reverse leakage current increases significantly.
Published Version
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