Abstract
Fe100-xPtx films with Pt contents (x) = 29–65 at.% were deposited directly onto thermally oxidized Si(100) substrate by dc magnetron sputtering. The films were then post-annealed at 700 °C for 3 min by rapid thermal annealing (RTA) at a high heating ramp rate of 100 °C/s. Experimental results show that Fe3Pt film displayed (111) preferred orientation and tended towards in-plane magnetic anisotropy when the Pt content was 29 at.%. When the Pt content was increased to 49 at.%, the FePt film inclined towards (001)-texture and perpendicular magnetic anisotropy. Its out-of-plane coercivity (Hc⊥), saturation magnetization (Ms) and out-of-plane squareness (S⊥) reached 1010 kA/m, 0.47 T and 0.8, respectively. These results reveal its significant potential as perpendicular magnetic recording media for high-density recording. Upon further increasing the Pt content to 65 at.%, the coercivity of the films decreased drastically to below 65 kA/m and tended towards in-plane magnetic anisotropy.
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